{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,5]],"date-time":"2026-03-05T04:46:44Z","timestamp":1772686004075,"version":"3.50.1"},"reference-count":50,"publisher":"MDPI AG","issue":"23","license":[{"start":{"date-parts":[[2022,12,1]],"date-time":"2022-12-01T00:00:00Z","timestamp":1669852800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"National Key Research and Development Program of China","award":["2019YFB2203003"],"award-info":[{"award-number":["2019YFB2203003"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Traditional temperature detection has limitations in terms of sensing accuracy and response time, while chip-level photoelectric sensors based on the thermo-optic effect can improve measurement sensitivity and reduce costs. This paper presents on-chip temperature sensors based on polysilicon (p-Si) waveguides. Dual-microring resonator (MRR) and asymmetric Mach\u2013Zehnder interferometer (AMZI) sensors are demonstrated. The experimental results show that the sensitivities of the sensors based on AMZI and MRR are 86.6 pm\/K and 85.7 pm\/K, respectively. The temperature sensors proposed in this paper are compatible with the complementary metal-oxide-semiconductor (CMOS) fabrication technique. Benefitting from high sensitivity and a compact footprint, these sensors show great potential in the field of photonic-electronic applications.<\/jats:p>","DOI":"10.3390\/s22239357","type":"journal-article","created":{"date-parts":[[2022,12,1]],"date-time":"2022-12-01T03:32:25Z","timestamp":1669865545000},"page":"9357","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":5,"title":["Optical Temperature Sensor Based on Polysilicon Waveguides"],"prefix":"10.3390","volume":"22","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-2820-4254","authenticated-orcid":false,"given":"Xinru","family":"Xu","sequence":"first","affiliation":[{"name":"State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-0774-0362","authenticated-orcid":false,"given":"Yuexin","family":"Yin","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chunlei","family":"Sun","sequence":"additional","affiliation":[{"name":"Key Laboratory of 3D Micro\/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou 310024, China"},{"name":"Institute of Advanced Technology, Westlake Institute for Advanced Study, Hangzhou 310024, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-9097-9157","authenticated-orcid":false,"given":"Lan","family":"Li","sequence":"additional","affiliation":[{"name":"Key Laboratory of 3D Micro\/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou 310024, China"},{"name":"Institute of Advanced Technology, Westlake Institute for Advanced Study, Hangzhou 310024, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Hongtao","family":"Lin","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Modern Optical Instrumentation, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Bo","family":"Tang","sequence":"additional","affiliation":[{"name":"Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Peng","family":"Zhang","sequence":"additional","affiliation":[{"name":"Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-7400-6662","authenticated-orcid":false,"given":"Changming","family":"Chen","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-5651-8699","authenticated-orcid":false,"given":"Daming","family":"Zhang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2022,12,1]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"6","DOI":"10.1109\/JLT.2018.2876828","article-title":"Silicon Photonic Switch Fabrics: Technology and Architecture","volume":"37","author":"Lee","year":"2019","journal-title":"J. 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