diff --git a/.github/workflows/ci.yml b/.github/workflows/ci.yml
index 9b604a7d..e0a47703 100644
--- a/.github/workflows/ci.yml
+++ b/.github/workflows/ci.yml
@@ -37,13 +37,13 @@ jobs:
     strategy:
       matrix:
         os: [ubuntu-latest]
-        node_version: [18, 20]
+        node_version: [20, 22, 24]
         include:
           # Active LTS + other OS
           - os: macos-latest
-            node_version: 20
+            node_version: 22
           - os: windows-latest
-            node_version: 20
+            node_version: 22
       fail-fast: false
 
     name: "Build&Test: node-${{ matrix.node_version }}, ${{ matrix.os }}"
diff --git a/eslint.config.js b/eslint.config.js
index c0c7d262..688137a1 100644
--- a/eslint.config.js
+++ b/eslint.config.js
@@ -120,13 +120,13 @@ export default tseslint.config(
       'n/no-unsupported-features/es-builtins': [
         'error',
         {
-          version: '^18.0.0 || >=20.0.0',
+          version: '^20.19.0 || >=22.12.0',
         },
       ],
       'n/no-unsupported-features/node-builtins': [
         'error',
         {
-          version: '^18.0.0 || >=20.0.0',
+          version: '^20.19.0 || >=22.12.0',
         },
       ],
       '@typescript-eslint/explicit-module-boundary-types': 'off',
@@ -150,7 +150,7 @@ export default tseslint.config(
       'n/no-unsupported-features/node-builtins': [
         'error',
         {
-          version: '^18.0.0 || >=20.0.0',
+          version: '^20.19.0 || >=22.12.0',
           allowExperimental: true,
         },
       ],
diff --git a/package.json b/package.json
index 14afee37..c9324ba8 100644
--- a/package.json
+++ b/package.json
@@ -3,7 +3,7 @@
   "private": true,
   "type": "module",
   "engines": {
-    "node": "^18.0.0 || >=20.0.0"
+    "node": "^20.19.0 || >=22.12.0"
   },
   "homepage": "https://github.com/vitejs/vite-plugin-vue/",
   "repository": {
diff --git a/packages/plugin-vue-jsx/build.config.ts b/packages/plugin-vue-jsx/build.config.ts
index 360c2e7c..a74f5d85 100644
--- a/packages/plugin-vue-jsx/build.config.ts
+++ b/packages/plugin-vue-jsx/build.config.ts
@@ -4,7 +4,4 @@ export default defineBuildConfig({
   entries: ['src/index'],
   clean: true,
   declaration: true,
-  rollup: {
-    emitCJS: true,
-  },
 })
diff --git a/packages/plugin-vue-jsx/package.json b/packages/plugin-vue-jsx/package.json
index cbb74198..7576c701 100644
--- a/packages/plugin-vue-jsx/package.json
+++ b/packages/plugin-vue-jsx/package.json
@@ -1,29 +1,23 @@
 {
   "name": "@vitejs/plugin-vue-jsx",
   "version": "4.2.0",
-  "type": "commonjs",
+  "type": "module",
   "license": "MIT",
   "author": "Evan You",
   "files": [
     "dist"
   ],
-  "main": "./dist/index.cjs",
-  "module": "./dist/index.mjs",
-  "types": "./dist/index.d.ts",
   "exports": {
-    ".": {
-      "import": "./dist/index.mjs",
-      "require": "./dist/index.cjs"
-    }
+    ".": "./dist/index.mjs",
+    "./package.json": "./package.json"
   },
   "scripts": {
     "dev": "unbuild --stub",
-    "build": "unbuild && pnpm run patch-cjs",
-    "patch-cjs": "tsx ../../scripts/patchCJS.ts",
+    "build": "unbuild",
     "prepublishOnly": "npm run build"
   },
   "engines": {
-    "node": "^18.0.0 || >=20.0.0"
+    "node": "^20.19.0 || >=22.12.0"
   },
   "repository": {
     "type": "git",
@@ -44,7 +38,7 @@
     "vite": "catalog:"
   },
   "peerDependencies": {
-    "vite": "^5.0.0 || ^6.0.0",
+    "vite": "^5.0.0 || ^6.0.0 || ^7.0.0-0",
     "vue": "^3.0.0"
   }
 }
diff --git a/packages/plugin-vue-jsx/src/index.ts b/packages/plugin-vue-jsx/src/index.ts
index bdec6c58..2bfb06fb 100644
--- a/packages/plugin-vue-jsx/src/index.ts
+++ b/packages/plugin-vue-jsx/src/index.ts
@@ -12,7 +12,7 @@ import {
 } from '@rolldown/pluginutils'
 import type { Options } from './types'
 
-export * from './types'
+export type * from './types'
 
 const ssrRegisterHelperId = '/__vue-jsx-ssr-register-helper'
 const ssrRegisterHelperCode =
@@ -328,17 +328,17 @@ function isDefineComponentCall(
   )
 }
 
-const hash =
-  // eslint-disable-next-line n/no-unsupported-features/node-builtins -- crypto.hash is supported in Node 21.7.0+, 20.12.0+
-  crypto.hash ??
-  ((
-    algorithm: string,
-    data: crypto.BinaryLike,
-    outputEncoding: crypto.BinaryToTextEncoding,
-  ) => crypto.createHash(algorithm).update(data).digest(outputEncoding))
-
 function getHash(text: string) {
-  return hash('sha256', text, 'hex').substring(0, 8)
+  return crypto.hash('sha256', text, 'hex').substring(0, 8)
 }
 
 export default vueJsxPlugin
+
+// Compat for require
+function vueJsxPluginCjs(this: unknown, options: Options): Plugin {
+  return vueJsxPlugin.call(this, options)
+}
+Object.assign(vueJsxPluginCjs, {
+  default: vueJsxPluginCjs,
+})
+export { vueJsxPluginCjs as 'module.exports' }
diff --git a/packages/plugin-vue-jsx/tsconfig.json b/packages/plugin-vue-jsx/tsconfig.json
index 3a3117f2..4f4926b9 100644
--- a/packages/plugin-vue-jsx/tsconfig.json
+++ b/packages/plugin-vue-jsx/tsconfig.json
@@ -3,9 +3,9 @@
   "exclude": ["**/*.spec.ts"],
   "compilerOptions": {
     "outDir": "dist",
-    "target": "ES2020",
-    "module": "ES2020",
-    "moduleResolution": "Node",
+    "target": "es2023",
+    "module": "preserve",
+    "moduleResolution": "bundler",
     "strict": true,
     "declaration": true,
     "sourceMap": true,
diff --git a/packages/plugin-vue/CHANGELOG.md b/packages/plugin-vue/CHANGELOG.md
index 3fe3cd3f..54ea8a58 100644
--- a/packages/plugin-vue/CHANGELOG.md
+++ b/packages/plugin-vue/CHANGELOG.md
@@ -1,3 +1,11 @@
+## 6.0.0-beta.2 (2025-06-06)
+
+* refactor!: bump required node version to 20.19+, 22.12+ and drop CJS build (#596) ([56df545](https://github.com/vitejs/vite-plugin-vue/commit/56df545)), closes [#596](https://github.com/vitejs/vite-plugin-vue/issues/596)
+* feat: add Vite 7 support (#597) ([12f2881](https://github.com/vitejs/vite-plugin-vue/commit/12f2881)), closes [#597](https://github.com/vitejs/vite-plugin-vue/issues/597)
+* fix: template src sourcemap source (#267) ([de18693](https://github.com/vitejs/vite-plugin-vue/commit/de18693)), closes [#267](https://github.com/vitejs/vite-plugin-vue/issues/267)
+
+
+
 ## 6.0.0-beta.1 (2025-06-02)
 
 * fix(vue): import with query (#592) ([b0400f3](https://github.com/vitejs/vite-plugin-vue/commit/b0400f3)), closes [#592](https://github.com/vitejs/vite-plugin-vue/issues/592)
diff --git a/packages/plugin-vue/build.config.ts b/packages/plugin-vue/build.config.ts
index 33fef7f6..12d46d0e 100644
--- a/packages/plugin-vue/build.config.ts
+++ b/packages/plugin-vue/build.config.ts
@@ -6,7 +6,6 @@ export default defineBuildConfig({
   clean: true,
   declaration: 'compatible',
   rollup: {
-    emitCJS: true,
     inlineDependencies: true,
   },
 })
diff --git a/packages/plugin-vue/package.json b/packages/plugin-vue/package.json
index 34bec69a..8e643a9c 100644
--- a/packages/plugin-vue/package.json
+++ b/packages/plugin-vue/package.json
@@ -1,29 +1,23 @@
 {
   "name": "@vitejs/plugin-vue",
-  "version": "6.0.0-beta.1",
-  "type": "commonjs",
+  "version": "6.0.0-beta.2",
+  "type": "module",
   "license": "MIT",
   "author": "Evan You",
   "files": [
     "dist"
   ],
-  "main": "./dist/index.cjs",
-  "module": "./dist/index.mjs",
-  "types": "./dist/index.d.ts",
   "exports": {
-    ".": {
-      "import": "./dist/index.mjs",
-      "require": "./dist/index.cjs"
-    }
+    ".": "./dist/index.mjs",
+    "./package.json": "./package.json"
   },
   "scripts": {
     "dev": "unbuild --stub",
-    "build": "unbuild && pnpm run patch-cjs",
-    "patch-cjs": "tsx ../../scripts/patchCJS.ts",
+    "build": "unbuild",
     "prepublishOnly": "npm run build"
   },
   "engines": {
-    "node": "^18.0.0 || >=20.0.0"
+    "node": "^20.19.0 || >=22.12.0"
   },
   "repository": {
     "type": "git",
@@ -35,7 +29,7 @@
   },
   "homepage": "https://github.com/vitejs/vite-plugin-vue/tree/main/packages/plugin-vue#readme",
   "peerDependencies": {
-    "vite": "^5.0.0 || ^6.0.0",
+    "vite": "^5.0.0 || ^6.0.0 || ^7.0.0-0",
     "vue": "^3.2.25"
   },
   "devDependencies": {
diff --git a/packages/plugin-vue/src/index.ts b/packages/plugin-vue/src/index.ts
index e4e0b4ee..c1af1840 100644
--- a/packages/plugin-vue/src/index.ts
+++ b/packages/plugin-vue/src/index.ts
@@ -490,6 +490,7 @@ export default function vuePlugin(rawOptions: Options = {}): Plugin<Api> {
           if (query.type === 'template') {
             return transformTemplateAsModule(
               code,
+              filename,
               descriptor,
               options.value,
               this,
@@ -516,3 +517,13 @@ export default function vuePlugin(rawOptions: Options = {}): Plugin<Api> {
 function ensureArray<T>(value: T | T[]): T[] {
   return Array.isArray(value) ? value : [value]
 }
+
+// Compat for require
+function vuePluginCjs(this: unknown, options: Options): Plugin<Api> {
+  return vuePlugin.call(this, options)
+}
+Object.assign(vuePluginCjs, {
+  default: vuePluginCjs,
+  parseVueRequest,
+})
+export { vuePluginCjs as 'module.exports' }
diff --git a/packages/plugin-vue/src/script.ts b/packages/plugin-vue/src/script.ts
index 899612d9..2f63f770 100644
--- a/packages/plugin-vue/src/script.ts
+++ b/packages/plugin-vue/src/script.ts
@@ -74,7 +74,12 @@ export function resolveScript(
     id: descriptor.id,
     isProd: options.isProduction,
     inlineTemplate: isUseInlineTemplate(descriptor, options),
-    templateOptions: resolveTemplateCompilerOptions(descriptor, options, ssr),
+    templateOptions: resolveTemplateCompilerOptions(
+      descriptor,
+      options,
+      descriptor.filename,
+      ssr,
+    ),
     sourceMap: options.sourceMap,
     genDefaultAs: canInlineMain(descriptor, options)
       ? scriptIdentifier
diff --git a/packages/plugin-vue/src/template.ts b/packages/plugin-vue/src/template.ts
index 8d8f3ba1..f9e2eddf 100644
--- a/packages/plugin-vue/src/template.ts
+++ b/packages/plugin-vue/src/template.ts
@@ -13,6 +13,7 @@ import type { ResolvedOptions } from './index'
 
 export async function transformTemplateAsModule(
   code: string,
+  filename: string,
   descriptor: SFCDescriptor,
   options: ResolvedOptions,
   pluginContext: Rollup.TransformPluginContext,
@@ -24,6 +25,7 @@ export async function transformTemplateAsModule(
 }> {
   const result = compile(
     code,
+    filename,
     descriptor,
     options,
     pluginContext,
@@ -62,6 +64,7 @@ export function transformTemplateInMain(
 ): SFCTemplateCompileResults {
   const result = compile(
     code,
+    descriptor.filename,
     descriptor,
     options,
     pluginContext,
@@ -80,16 +83,16 @@ export function transformTemplateInMain(
 // eslint-disable-next-line @typescript-eslint/explicit-module-boundary-types
 export function compile(
   code: string,
+  filename: string,
   descriptor: SFCDescriptor,
   options: ResolvedOptions,
   pluginContext: Rollup.PluginContext,
   ssr: boolean,
   customElement: boolean,
 ) {
-  const filename = descriptor.filename
   resolveScript(descriptor, options, ssr, customElement)
   const result = options.compiler.compileTemplate({
-    ...resolveTemplateCompilerOptions(descriptor, options, ssr)!,
+    ...resolveTemplateCompilerOptions(descriptor, options, filename, ssr)!,
     source: code,
   })
 
@@ -118,6 +121,7 @@ export function compile(
 export function resolveTemplateCompilerOptions(
   descriptor: SFCDescriptor,
   options: ResolvedOptions,
+  filename: string,
   ssr: boolean,
 ): Omit<SFCTemplateCompileOptions, 'source'> | undefined {
   const block = descriptor.template
@@ -126,7 +130,7 @@ export function resolveTemplateCompilerOptions(
   }
   const resolvedScript = getResolvedScript(descriptor, ssr)
   const hasScoped = descriptor.styles.some((s) => s.scoped)
-  const { id, filename, cssVars } = descriptor
+  const { id, cssVars } = descriptor
 
   let transformAssetUrls = options.template?.transformAssetUrls
   // compiler-sfc should export `AssetURLOptions`
diff --git a/packages/plugin-vue/tsconfig.json b/packages/plugin-vue/tsconfig.json
index cec54d61..c22bb7b8 100644
--- a/packages/plugin-vue/tsconfig.json
+++ b/packages/plugin-vue/tsconfig.json
@@ -3,9 +3,9 @@
   "exclude": ["**/*.spec.ts"],
   "compilerOptions": {
     "outDir": "dist",
-    "target": "ES2020",
-    "module": "ES2020",
-    "moduleResolution": "node",
+    "target": "es2023",
+    "module": "preserve",
+    "moduleResolution": "bundler",
     "strict": true,
     "declaration": true,
     "sourceMap": true,
diff --git a/playground/tsconfig.json b/playground/tsconfig.json
index 54fb5cd9..7f7356c8 100644
--- a/playground/tsconfig.json
+++ b/playground/tsconfig.json
@@ -2,7 +2,7 @@
   "include": ["."],
   "exclude": ["**/dist/**"],
   "compilerOptions": {
-    "target": "ES2020",
+    "target": "ES2023",
     "module": "ESNext",
     "outDir": "dist",
     "baseUrl": ".",
diff --git a/playground/vue-sourcemap/Main.vue b/playground/vue-sourcemap/Main.vue
index 8b092e88..d63d3799 100644
--- a/playground/vue-sourcemap/Main.vue
+++ b/playground/vue-sourcemap/Main.vue
@@ -7,6 +7,7 @@
   <SassWithImport />
   <Less />
   <SrcImport />
+  <SrcImportHtml />
   <NoScript />
   <NoTemplate />
 </template>
@@ -19,6 +20,7 @@ import Sass from './Sass.vue'
 import SassWithImport from './SassWithImport.vue'
 import Less from './Less.vue'
 import SrcImport from './src-import/SrcImport.vue'
+import SrcImportHtml from './src-import-html/SrcImportHtml.vue'
 import NoScript from './NoScript.vue'
 import NoTemplate from './NoTemplate.vue'
 </script>
diff --git a/playground/vue-sourcemap/__tests__/__snapshots__/vue-sourcemap.spec.ts.snap b/playground/vue-sourcemap/__tests__/__snapshots__/vue-sourcemap.spec.ts.snap
index 6708af56..5c648978 100644
--- a/playground/vue-sourcemap/__tests__/__snapshots__/vue-sourcemap.spec.ts.snap
+++ b/playground/vue-sourcemap/__tests__/__snapshots__/vue-sourcemap.spec.ts.snap
@@ -315,6 +315,20 @@ exports[`serve:vue-sourcemap > src imported > serve-src-imported 1`] = `
 }
 `;
 
+exports[`serve:vue-sourcemap > src imported html > serve-html 1`] = `
+{
+  "mappings": ";;;wBAAA,oBAA8B,WAA3B,mBAAuB",
+  "sources": [
+    "src-import.html",
+  ],
+  "sourcesContent": [
+    "<p>&lt;src-import-html&gt;</p>
+",
+  ],
+  "version": 3,
+}
+`;
+
 exports[`serve:vue-sourcemap > src imported sass > serve-src-imported-sass 1`] = `
 {
   "ignoreList": [],
diff --git a/playground/vue-sourcemap/__tests__/vue-sourcemap.spec.ts b/playground/vue-sourcemap/__tests__/vue-sourcemap.spec.ts
index 6cd0586d..7e03da16 100644
--- a/playground/vue-sourcemap/__tests__/vue-sourcemap.spec.ts
+++ b/playground/vue-sourcemap/__tests__/vue-sourcemap.spec.ts
@@ -91,6 +91,18 @@ describe.runIf(isServe)('serve:vue-sourcemap', () => {
     )
   })
 
+  test('src imported html', async () => {
+    const res = await page.request.get(
+      new URL(
+        './src-import-html/src-import.html?import&vue&type=template&src=true&lang.js',
+        page.url(),
+      ).href,
+    )
+    const js = await res.text()
+    const map = extractSourcemap(js)
+    expect(formatSourcemapForSnapshot(map)).toMatchSnapshot('serve-html')
+  })
+
   test('no script', async () => {
     const res = await page.request.get(
       new URL('./NoScript.vue', page.url()).href,
diff --git a/playground/vue-sourcemap/src-import-html/SrcImportHtml.vue b/playground/vue-sourcemap/src-import-html/SrcImportHtml.vue
new file mode 100644
index 00000000..79e3f7b0
--- /dev/null
+++ b/playground/vue-sourcemap/src-import-html/SrcImportHtml.vue
@@ -0,0 +1,5 @@
+<template src="https://github.com/src-import.html" />
+
+<script setup lang="ts">
+console.log('src-import-html')
+</script>
diff --git a/playground/vue-sourcemap/src-import-html/src-import.html b/playground/vue-sourcemap/src-import-html/src-import.html
new file mode 100644
index 00000000..7202ea93
--- /dev/null
+++ b/playground/vue-sourcemap/src-import-html/src-import.html
@@ -0,0 +1 @@
+<p>&lt;src-import-html&gt;</p>
diff --git a/scripts/patchCJS.ts b/scripts/patchCJS.ts
deleted file mode 100644
index 192264e6..00000000
--- a/scripts/patchCJS.ts
+++ /dev/null
@@ -1,57 +0,0 @@
-/**
-
-It converts
-
-```ts
-exports.default = vuePlugin;
-exports.parseVueRequest = parseVueRequest;
-```
-
-to
-
-```ts
-module.exports = vuePlugin;
-module.exports.default = vuePlugin;
-module.exports.parseVueRequest = parseVueRequest;
-```
-*/
-
-import { readFileSync, writeFileSync } from 'node:fs'
-import colors from 'picocolors'
-
-const indexPath = 'dist/index.cjs'
-let code = readFileSync(indexPath, 'utf-8')
-
-const matchMixed = code.match(/\nexports.default = (\w+);/)
-if (matchMixed) {
-  const name = matchMixed[1]
-
-  const lines = code.trimEnd().split('\n')
-
-  // search from the end to prepend `modules.` to `export[xxx]`
-  for (let i = lines.length - 1; i > 0; i--) {
-    if (lines[i].startsWith('exports')) lines[i] = 'module.' + lines[i]
-    else {
-      // at the beginning of exports, export the default function
-      lines[i] += `\nmodule.exports = ${name};`
-      break
-    }
-  }
-
-  writeFileSync(indexPath, lines.join('\n'))
-
-  console.log(colors.bold(`${indexPath} CJS patched`))
-  process.exit(0)
-}
-
-const matchDefault = code.match(/\nmodule.exports = (\w+);/)
-
-if (matchDefault) {
-  code += `module.exports.default = ${matchDefault[1]};\n`
-  writeFileSync(indexPath, code)
-  console.log(colors.bold(`${indexPath} CJS patched`))
-  process.exit(0)
-}
-
-console.error(colors.red(`${indexPath} CJS patch failed`))
-process.exit(1)
diff --git a/scripts/tsconfig.json b/scripts/tsconfig.json
index dd4d2c86..67b84be9 100644
--- a/scripts/tsconfig.json
+++ b/scripts/tsconfig.json
@@ -2,9 +2,9 @@
   "$schema": "https://json.schemastore.org/tsconfig",
   "include": ["."],
   "compilerOptions": {
-    "module": "ES2020",
-    "target": "ES2020",
-    "moduleResolution": "Node",
+    "target": "es2023",
+    "module": "preserve",
+    "moduleResolution": "bundler",
     "strict": true,
     "esModuleInterop": true,
     "skipLibCheck": true,